异质结栅介质对双环栅场效应晶体管电热性能影响的研究

徐国 章, 洁 许

摘要


研究了异质结栅介质对双环栅（DGAA）FET 自热效应及短沟道效应的影响。结果表明，HGD 结构对 DGAA FET中自热效应的改善具有较大的局限性，不适用于电热折衷设计。

关键词


异质结栅介质；双环栅；自热效应；短沟道效应

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参考


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DOI: https://doi.org/10.12346/etr.v4i3.5808

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